Ubiquitous Relaxation in Bti Stressing—new Evaluation and Insights

نویسندگان

  • B. Kaczer
  • T. Grasser
  • Ph. J. Roussel
  • J. Martin-Martinez
  • R. O’Connor
  • B. J. O’Sullivan
  • G. Groeseneken
چکیده

The ubiquity of threshold voltage relaxation is demonstrated in samples with both conventional and high-k dielectrics following various stress conditions. A technique based on recording short traces of relaxation during each measurement phase of a standard measure-stress-measure sequence allows monitoring and correcting for the otherwise-unknown relaxation component. The properties of relaxation are discussed in detail for pFET with SiON dielectric subjected to NBTI stress. Based on similarities with dielectric relaxation, a physical picture and an equivalent circuit are proposed.

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تاریخ انتشار 2008